Open AccessAxial evolution of the electron energy distribution in capacitive discharges
Author(s) -
Rositsa Pavlova,
Bogdan Gilev,
Kh. Tarnev
Publication year - 2018
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.5082065
Subject(s) - capacitive sensing , electrode , monte carlo method , plasma , atomic physics , electron , materials science , particle in cell , energy (signal processing) , physics , computational physics , electrical engineering , nuclear physics , engineering , statistics , mathematics , quantum mechanics
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom