Open AccessGeneration of plasma torch by 2.45 GHz microwaves from a solid-state power amplifier
Author(s) -
Dong Hun Shin,
Se Min Chun,
Yong Cheol Hong,
Ju S. Lee
Publication year - 2019
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/1.5081963
Subject(s) - cavity magnetron , microwave , plasma , amplifier , materials science , resonator , torch , atmospheric pressure , analytical chemistry (journal) , optoelectronics , atomic physics , chemistry , physics , thin film , composite material , cmos , chromatography , quantum mechanics , welding , meteorology , sputtering , nanotechnology
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