Open AccessThe influence of design parameters on the performance of FBAR in 15–19 GHz
Author(s) -
N. I. M. Nor,
N. Ahmad,
N. Khalid,
Muammar Mohamad Isa,
Siti S. Mat Isa,
Muhammad M. Ramli,
Shahrir R. Kasjoo
Publication year - 2018
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.5080901
Subject(s) - materials science , capacitance , piezoelectricity , resonator , electrical impedance , acoustics , nitride , aluminium , optoelectronics , electrical engineering , composite material , engineering , physics , layer (electronics) , electrode , quantum mechanics
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