Deformation induced complete amorphization at nanoscale in a bulk silicon

Solid state amorphization is induced by shock, irradiation and deformation, while deformation induced complete amorphization remains a challenge in a bulk solid. Brittle-to-ductile transition (BDT) mechanism is elusive at loading speeds of m/s at nanoscale depth of cut. Existing formula has no effects of shape and radius of cutting edges on the critical depth of cut at BDT. In this study, a new route of deformation induced complete amorphization at nanoscale is proposed in a bulk solid confirmed by transmission electron microscopy (TEM). This is performed by a novel approach of ultraprecision grinding, conducted on a specially designed setup. The grinding is carried out by a developed single diamond grain with a cutting edge radius of 2.5 μm, at depth of cut of 24 nm under a loading speed of 40 m/s. BDT takes place at depth of cut of 419 and 172 nm for Si (100) respectively, ground by single diamond grains with tip radii of 5 and 2.5 μm correspondingly. A new model is suggested for BDT, considering the effects of radius and shape of cutting edges. The findings provide new insights for design and fabrication of high performance devices used in flexible electronics, nanodevices, microelectronics and optoelectronics.