Open AccessThree degree of freedom piezoelectric actuator for precise positioning
Author(s) -
Dalius Mažeika,
R. Bansevičius,
Vytautas Jūrėnas,
Genadijus Kulvietis,
Sergėjus Borodinas
Publication year - 2018
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.5066501
Subject(s) - actuator , acoustics , piezoelectricity , transducer , vibration , resonator , piezoelectric motor , cylinder , pmut , harmonic , materials science , optics , physics , mechanical engineering , engineering , electrical engineering
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