Open AccessAn evaluation of Fuchs-Sondheimer and Mayadas-Shatzkes models below 14nm node wide lines
Author(s) -
Ryan Smith,
E. Todd Ryan,
C.K. Hu,
K. Motoyama,
Nicholas A. Lanzillo,
David E. Metzler,
L. Jiang,
J. Demarest,
R. Quon,
Lynne Gignac,
Chris Breslin,
A. Giannetta,
S. L. Wright
Publication year - 2019
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/1.5063896
Subject(s) - specularity , node (physics) , aspect ratio (aeronautics) , scattering , materials science , surface finish , condensed matter physics , variable (mathematics) , dimension (graph theory) , optics , mathematics , mathematical analysis , physics , pure mathematics , quantum mechanics , composite material , specular reflection
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