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Enhancing the adhesion and tribological performance of Si-DLC film on NBR by Ar plasma pretreatment under a high bias
Author(s) -
Li Qiang,
Changning Bai,
Aimin Liang,
Junyan Zhang
Publication year - 2019
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/1.5063365
Subject(s) - tribology , materials science , adhesion , diamond like carbon , substrate (aquarium) , sputter deposition , composite material , layer (electronics) , x ray photoelectron spectroscopy , surface roughness , silicon , surface modification , carbon fibers , fourier transform infrared spectroscopy , sputtering , chemical engineering , nanotechnology , thin film , metallurgy , composite number , oceanography , geology , engineering

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