Open AccessObtaining the CrN coating inside the barrel using a cylindrical magnetron with a dynamic magnetic field
Author(s) -
M. Betiuk,
Piotr Domanowski
Publication year - 2018
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.5056265
Subject(s) - cavity magnetron , anode , coating , materials science , cathode , polarization (electrochemistry) , impulse (physics) , plasma , magnetic field , excitation , composite material , mechanical engineering , electrical engineering , electrode , engineering , thin film , physics , nanotechnology , chemistry , quantum mechanics , sputtering
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