Effect of surface stress induced curvature on the eigenfrequencies of microcantilever plates
Author(s) -
J. J. Ruz,
Valerio Pini,
Óscar Malvar,
Priscila M. Kosaka,
Montserrat Calleja,
Javier Tamayo
Publication year - 2018
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/1.5053561
Subject(s) - cantilever , surface stress , curvature , stress (linguistics) , stiffness , surface (topology) , bending , materials science , vibration , fabrication , microelectromechanical systems , bending stiffness , nanotechnology , mechanics , classical mechanics , physics , acoustics , composite material , mathematics , geometry , medicine , linguistics , philosophy , alternative medicine , pathology
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