Open AccessInvestigation of silicon wafers thermal degradation by photoluminescence decay measurements
Author(s) -
D. A. Kudryashov,
А.С. Гудовских,
A V Uvarov,
E. V. Nikitina
Publication year - 2018
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.5053513
Subject(s) - passivation , wafer , silicon , carrier lifetime , materials science , photoluminescence , annealing (glass) , thermal oxidation , optoelectronics , degradation (telecommunications) , analytical chemistry (journal) , atmospheric temperature range , etching (microfabrication) , layer (electronics) , electronic engineering , nanotechnology , composite material , chemistry , physics , chromatography , meteorology , engineering
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