Open AccessEBIS-based HCI micro-beams
Author(s) -
M. Schmidt,
Paul-Friedmar Laux,
J. Giérak,
G. Zschornack
Publication year - 2018
Publication title -
aip conference proceedings
Language(s) - Uncategorized
Resource type - Conference proceedings
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.5053408
Subject(s) - ion source , ion beam , micrometer , ion , materials science , focused ion beam , ion beam deposition , beam (structure) , ion gun , mass spectrometry , range (aeronautics) , optics , chemistry , physics , organic chemistry , chromatography , composite material
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