A pulsed vacuum arc ion source with a pure boron cathode
Author(s) -
V. I. Gushenets,
Е. М. Oks,
А. С. Бугаев
Publication year - 2018
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.5053387
Subject(s) - boron , materials science , cathode , vacuum arc , cathodic arc deposition , arc (geometry) , electric arc , cathodic protection , ion , electrode , ionization , analytical chemistry (journal) , atomic physics , anode , chemistry , physics , geometry , mathematics , organic chemistry , chromatography
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