Open AccessDevelopment of a prototype PIG ion source with electric magnets for a compact ion microbeam system
Author(s) -
Yasuyuki Ishii,
Tomomasa Ohkubo,
H. Kashiwagi,
Yoshinobu Miyake
Publication year - 2018
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.5053370
Subject(s) - ion source , microbeam , ion gun , ion beam , ion beam deposition , ion , atomic physics , materials science , penning ionization , ionization , physics , nuclear physics , quantum mechanics
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