Open AccessNumerical analysis of ion dynamics in RF ICP discharge
Author(s) -
Kazuhiro Nishida,
S. Mattei,
W. Kobayashi,
J. Lettry,
A. Hatayama
Publication year - 2018
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.5053312
Subject(s) - radio frequency , ion , hydrogen , inductively coupled plasma , plasma , atomic physics , mode (computer interface) , materials science , computational physics , work (physics) , computer simulation , numerical analysis , physics , mechanics , computer science , telecommunications , thermodynamics , mathematics , quantum mechanics , operating system , mathematical analysis
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