Open AccessElectromagnetic fields and antenna impedance analysis of an RF ion source at HUST
Author(s) -
Peng Zhao,
Dezhi Chen,
Dong Li,
Chen Zuo
Publication year - 2018
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.5053305
Subject(s) - antenna (radio) , inductively coupled plasma , plasma , electromagnetic coil , computational physics , materials science , inductance , hfss , electrical impedance , physics , electrical engineering , engineering , microstrip antenna , voltage , quantum mechanics
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