Open AccessCOMSOL simulation of a 2.45 GHz electron cyclotron resonance argon plasma
Author(s) -
Mostafa Salahshoor,
M. Aslaninejad
Publication year - 2018
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.5053298
Subject(s) - electron cyclotron resonance , argon , electromagnetic electron wave , atomic physics , plasma , microwave , ion cyclotron resonance , ion source , magnetic field , fourier transform ion cyclotron resonance , electron , plasma parameters , plasma diagnostics , cyclotron resonance , highly charged ion , electron density , materials science , cyclotron , physics , ion , nuclear physics , quantum mechanics
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