Open AccessMultiply charged ion source based on high current short pulse vacuum arc
Author(s) -
V. P. Frolova,
А. Г. Николаев,
Е. М. Oks,
G. Yu. Yushkov
Publication year - 2018
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.5053268
Subject(s) - vacuum arc , ion gun , atomic physics , ion source , ion beam deposition , ion beam , ion current , ion , ionization , materials science , plasma , chemistry , cathode , physics , nuclear physics , organic chemistry
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