Open AccessHot filament performance in a Freeman ion source
Author(s) -
Ilija Draganić,
Christopher P. Leibman,
Lawrence Rybarcyk,
Tyler M. Bronson,
Kevin W. Dudeck
Publication year - 2018
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.5053266
Subject(s) - ion source , ion , protein filament , sputtering , atomic physics , ion gun , ion beam , ion beam deposition , materials science , tungsten , ionization , plasma , evaporation , analytical chemistry (journal) , chemistry , nuclear physics , physics , nanotechnology , thin film , composite material , organic chemistry , chromatography , metallurgy , thermodynamics
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