Open AccessEnhanced production of electron cyclotron resonance plasma by positioning plate-tuner
Author(s) -
Kouta Hamada,
Takuto Watanabe,
Yuto Tsuda,
Kōji Onishi,
Tatsuto Takeda,
Yushi Kato
Publication year - 2018
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.5053254
Subject(s) - tuner , electron cyclotron resonance , microwave , plasma , materials science , ion source , dense plasma focus , saturation current , atomic physics , physics , radio frequency , electrical engineering , nuclear physics , voltage , engineering , quantum mechanics
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