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First results on radial and azimuthal dependence of plasma parameters in a hexapole-trapped ECR discharge
Author(s) -
R. Rácz,
S. Biri,
Z. Perduk,
J. Pálinkás
Publication year - 2018
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.5053252
Subject(s) - plasma , langmuir probe , plasma diagnostics , atomic physics , plasma parameters , electron temperature , electron , azimuth , electron density , materials science , physics , optics , quantum mechanics

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