Open AccessImpact of thermal treatment on the growth of semipolar AlN on m-plane sapphire
Author(s) -
Masafumi Jo,
Naoki Morishita,
Narihito Okada,
Yuri Itokazu,
Norihiko Kamata,
Kazuyuki Tadatomo,
Hideki Hirayama
Publication year - 2018
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/1.5052294
Subject(s) - sapphire , materials science , annealing (glass) , nitride , stacking , optoelectronics , transmission electron microscopy , composite material , layer (electronics) , nanotechnology , optics , chemistry , laser , physics , organic chemistry
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