Open AccessElectron-beam radiation induced degradation of silicon nitride and its impact to semiconductor failure analysis by TEM
Author(s) -
Binghai Liu,
Zhili Dong,
Hua Younan,
Chao Fu,
Xiaomin Li,
Pik Kee Tan,
Yuzhe Zhao
Publication year - 2018
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/1.5051813
Subject(s) - materials science , silicon nitride , silicon , nitride , optoelectronics , transmission electron microscopy , semiconductor , radiation damage , semiconductor device , thin film , layer (electronics) , nanotechnology , radiation , optics , physics
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