Open AccessSingle crystal diamond micro-disk resonators by focused ion beam milling
Author(s) -
Teodoro Graziosi,
Sichen Mi,
Marcell Kiss,
Niels Quack
Publication year - 2018
Publication title -
apl photonics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 2.094
H-Index - 34
ISSN - 2378-0967
DOI - 10.1063/1.5051316
Subject(s) - materials science , focused ion beam , diamond , ion milling machine , reactive ion etching , ion beam , deep reactive ion etching , chemical vapor deposition , polishing , optoelectronics , wafer , etching (microfabrication) , ion , optics , nanotechnology , composite material , beam (structure) , chemistry , physics , organic chemistry , layer (electronics)
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