Open AccessGettering of transition metals in high-performance multicrystalline silicon by silicon nitride films and phosphorus diffusion
Author(s) -
AnYao Liu,
Chang Sun,
Hang Cheong Sio,
Xinyu Zhang,
Hao Jin,
Daniel Macdonald
Publication year - 2019
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/1.5050566
Subject(s) - ingot , getter , materials science , silicon , wafer , impurity , carrier lifetime , secondary ion mass spectrometry , metallurgy , silicon nitride , analytical chemistry (journal) , optoelectronics , chemistry , ion , alloy , organic chemistry , chromatography
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