Open AccessImpedance spectroscopy of Al/AlN/n-Si metal-insulator-semiconductor (MIS) structures
Author(s) -
Rainer Schmidt,
P. M. Mayrhofer,
U. Schmid,
Achim Bittner
Publication year - 2019
Publication title -
journal of applied physics
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/1.5050181
Subject(s) - materials science , permittivity , optoelectronics , dielectric , capacitor , schottky barrier , dielectric spectroscopy , equivalent circuit , semiconductor , substrate (aquarium) , sputtering , schottky diode , electrode , thin film , electrical engineering , diode , nanotechnology , chemistry , oceanography , voltage , geology , electrochemistry , engineering
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