Open AccessSidewall profile reconstruction of microstructures with high aspect ratio based on near-infrared light scanning interferometry
Author(s) -
Jianhua Shi,
Bingchen Han
Publication year - 2018
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/1.5049494
Subject(s) - materials science , optics , white light interferometry , scanning electron microscope , infrared , interferometry , microstructure , interference (communication) , optoelectronics , physics , composite material , channel (broadcasting) , electrical engineering , engineering
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom