Open AccessA novel approach for suppression of oxygen precipitation in CZ silicon wafers of solar cells by pre-thermal treatment
Author(s) -
Katsuto Tanahashi,
Tetsuo Fukuda,
Katsuhiko Shirasawa,
Hidetaka Takato
Publication year - 2018
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.5049337
Subject(s) - wafer , silicon , materials science , rapid thermal processing , annealing (glass) , precipitation , thermal oxidation , oxygen , solar cell , isothermal process , analytical chemistry (journal) , thermal , optoelectronics , metallurgy , chemistry , physics , organic chemistry , chromatography , meteorology , thermodynamics
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom