Open AccessRole of hydrogen: Formation and passivation of meta-stable defects due to hydrogen in silicon
Author(s) -
Moonyong Kim,
Daniel Chen,
Malcolm Abbott,
Stuart Wenham,
Brett Hallam
Publication year - 2018
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.5049329
Subject(s) - passivation , silicon , hydrogen , annealing (glass) , materials science , wafer , crystalline silicon , carrier lifetime , optoelectronics , nanotechnology , chemistry , metallurgy , layer (electronics) , organic chemistry
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