Development and characterization of multifunctional PECVD SiNX:P layers for laser-doped selective emitters | Zendy

Mohammad Hassan Norouzi | Zendy; Pierre SaintCast | Zendy; Elmar Lohmüller | Zendy; Julian Weber | Zendy; Simon Gutscher | Zendy; Jonas Bartsch | Zendy; Sven Kluska | Zendy; Bernd Steinhauser | Zendy; Sabrina Lohmüller | Zendy; Bernd Bitnar | Zendy; Dirk Holger Neuhaus | Zendy; Phedon Palinginis | Zendy; Jan Benick | Zendy; Marc Hofmann | Zendy; Andreas Wolf | Zendy

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Development and characterization of multifunctional PECVD SiNX:P layers for laser-doped selective emitters

Author(s) -

Mohammad Hassan Norouzi,

Pierre SaintCast,

Elmar Lohmüller,

Julian Weber,

Simon Gutscher,

Jonas Bartsch,

Sven Kluska,

Bernd Steinhauser,

Sabrina Lohmüller,

Bernd Bitnar,

Dirk Holger Neuhaus,

Phedon Palinginis,

Jan Benick,

Marc Hofmann,

Andreas Wolf

Publication year - 2018

Publication title -

aip conference proceedings

Language(s) - English

Resource type - Conference proceedings

eISSN - 1551-7616

pISSN - 0094-243X

DOI - 10.1063/1.5049314

Subject(s) - materials science , passivation , optoelectronics , plasma enhanced chemical vapor deposition , doping , silicon nitride , silicon , chemical vapor deposition , monocrystalline silicon , dopant , layer (electronics) , common emitter , stack (abstract data type) , nanocrystalline silicon , sheet resistance , crystalline silicon , nanotechnology , amorphous silicon , computer science , programming language

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