Open AccessSimplified surface cleaning for fabrication of silicon heterojunction solar cells
Author(s) -
Xiaoqian Lu,
M. Koppes,
P.C.P. Bronsveld
Publication year - 2018
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.5049295
Subject(s) - passivation , materials science , fabrication , wafer , heterojunction , isotropic etching , etching (microfabrication) , optoelectronics , silicon , solar cell , nanotechnology , layer (electronics) , medicine , alternative medicine , pathology
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