Open AccessDevelopment of an ozone-based inline cleaning and conditioning concept
Author(s) -
Andreas Fischer,
Anamaria Moldovan,
Jan Temmler,
Martin Zimmer,
J. Rentsch
Publication year - 2018
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.5049291
Subject(s) - passivation , wafer , homogeneity (statistics) , materials science , conditioning , silicon , optoelectronics , common emitter , process engineering , electronic engineering , layer (electronics) , composite material , computer science , engineering , statistics , mathematics , machine learning
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