Improvement of the conductivity and surface passivation properties of boron-doped poly-silicon on oxide | Zendy

Audrey Morisset | Zendy; Raphaël Cabal | Zendy; Bernadette Grange | Zendy; Clément Marchat | Zendy; José Alvarez | Zendy; MarieEstelle GueunierFarret | Zendy; Sébastien Dubois | Zendy; JeanPaul Kleider | Zendy

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Improvement of the conductivity and surface passivation properties of boron-doped poly-silicon on oxide

Author(s) -

Audrey Morisset,

Raphaël Cabal,

Bernadette Grange,

Clément Marchat,

José Alvarez,

MarieEstelle GueunierFarret,

Sébastien Dubois,

JeanPaul Kleider

Publication year - 2018

Publication title -

aip conference proceedings

Language(s) - English

Resource type - Conference proceedings

SCImago Journal Rank - 0.177

H-Index - 75

eISSN - 1551-7616

pISSN - 0094-243X

DOI - 10.1063/1.5049280

Subject(s) - passivation , materials science , silicon , plasma enhanced chemical vapor deposition , annealing (glass) , chemical vapor deposition , conductivity , doping , oxide , boron , thin film , nanocrystalline silicon , silicon oxide , optoelectronics , layer (electronics) , chemical engineering , crystalline silicon , nanotechnology , composite material , metallurgy , amorphous silicon , chemistry , silicon nitride , organic chemistry , engineering

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