Chemical vapor deposition of monolayer-thin WS2 crystals from the WF6 and H2S precursors at low deposition temperature | Zendy

Benjamin Groven | Zendy; D. Claes | Zendy; Ankit Nalin Mehta | Zendy; H. Bender | Zendy; Wilfried Vandervorst | Zendy; Marc Heyns | Zendy; Matty Caymax | Zendy; Iuliana Radu | Zendy; Annelies Delabie | Zendy

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Chemical vapor deposition of monolayer-thin WS2 crystals from the WF6 and H2S precursors at low deposition temperature

Author(s) -

Benjamin Groven,

D. Claes,

Ankit Nalin Mehta,

H. Bender,

Wilfried Vandervorst,

Marc Heyns,

Matty Caymax,

Iuliana Radu,

Annelies Delabie

Publication year - 2019

Publication title -

the journal of chemical physics

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.071

H-Index - 357

eISSN - 1089-7690

pISSN - 0021-9606

DOI - 10.1063/1.5048346

Subject(s) - monolayer , nucleation , chemical vapor deposition , layer (electronics) , amorphous solid , adsorption , thin film , crystal (programming language) , crystal growth , chemistry , deposition (geology) , chemical engineering , materials science , crystallography , chemical physics , nanotechnology , organic chemistry , computer science , programming language , paleontology , engineering , sediment , biology

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