Open AccessWafer-scale photolithography of ultra-sensitive nanocantilever force sensors
Author(s) -
Ying Pan,
Calder Miller,
Kai Trepka,
Ye Tao
Publication year - 2018
Publication title -
applied physics letters
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/1.5043479
Subject(s) - photolithography , wafer , materials science , fabrication , nanotechnology , microelectromechanical systems , nanoelectromechanical systems , silicon , dissipation , silicon on insulator , optoelectronics , resonator , microfluidics , cantilever , microfabrication , nanowire , composite material , nanoparticle , physics , medicine , nanomedicine , alternative medicine , pathology , thermodynamics
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