Open AccessMeasurement of time-resolved plasma parameters in an active screen plasma nitriding system
Author(s) -
M. Zaka-ul-Islam
Publication year - 2018
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.5042403
Subject(s) - plasma , materials science , langmuir probe , nitriding , plasma parameters , work function , pulsed power , current (fluid) , plasma diagnostics , atmospheric pressure plasma , atomic physics , voltage , analytical chemistry (journal) , chemistry , metal , composite material , layer (electronics) , metallurgy , electrical engineering , thermodynamics , physics , quantum mechanics , chromatography , engineering
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