Open AccessHigh-temperature high-sensitivity AlN-on-SOI Lamb wave resonant strain sensor
Author(s) -
Shaoxu Dou,
Mengke Qi,
Cong Chen,
Hong Zhou,
Yong Wang,
Zhengguo Shang,
Jing Yang,
Dengpan Wang,
Xiaojing Mu
Publication year - 2018
Publication title -
aip advances
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/1.5037721
Subject(s) - lamb waves , materials science , rayleigh wave , rayleigh scattering , piezoelectricity , resonator , composite material , optoelectronics , acoustics , surface wave , optics , physics
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