Open AccessAnnealing behavior of open spaces in AlON films studied by monoenergetic positron beams
Author(s) -
Akira Uedono,
Takahiro Yamada,
Takuji Hosoi,
Werner Egger,
Tönjes Koschine,
C. Hugenschmidt,
Marcel Dickmann,
Heiji Watanabe
Publication year - 2018
Publication title -
applied physics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/1.5027257
Subject(s) - annealing (glass) , amorphous solid , positron , materials science , sputtering , thin film , nitrogen , chemical engineering , crystallography , nanotechnology , chemistry , composite material , nuclear physics , physics , electron , organic chemistry , engineering
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