Open AccessOn the noise optimization of resonant MEMS sensors utilizing vibration mode localization
Author(s) -
Chun Zhao,
Milind Pandit,
Guillermo Sobreviela,
Arif Mustafazade,
Sijun Du,
Xudong Zou,
Ashwin A. Seshia
Publication year - 2018
Publication title -
applied physics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/1.5025818
Subject(s) - vibration , resonator , stiffness , amplitude , microelectromechanical systems , acoustics , noise (video) , resolution (logic) , perturbation (astronomy) , materials science , coupling (piping) , normal mode , physics , optics , optoelectronics , computer science , image (mathematics) , quantum mechanics , artificial intelligence , metallurgy , composite material
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom