Open AccessThickness dependence of crystal and optical characterization on ZnO thin film grown by atomic layer deposition
Author(s) -
SeungHye Baek,
Hyun-Jin Lee,
SungNam Lee
Publication year - 2018
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/1.5025685
Subject(s) - materials science , sapphire , substrate (aquarium) , layer (electronics) , thin film , diffraction , atomic layer deposition , deposition (geology) , crystallography , analytical chemistry (journal) , optoelectronics , optics , nanotechnology , chemistry , laser , paleontology , sediment , biology , oceanography , physics , chromatography , geology
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