Open AccessStudy of cavity effect in micro-Pirani gauge chamber with improved sensitivity for high vacuum regime
Author(s) -
Guohe Zhang,
Junhua Lai,
Yanmei Kong,
Binbin Jiao,
Shichang Yun,
Yuxin Ye
Publication year - 2018
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/1.5025611
Subject(s) - thermal conduction , heat transfer , gauge (firearms) , pressure measurement , materials science , thermal , vacuum chamber , thermodynamics , convection , mechanics , chemistry , composite material , physics , metallurgy
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