Open AccessFull three-dimensional morphology evolution of amorphous thin films for atomic layer deposition
Author(s) -
Lingpeng Jin,
Yawei Li,
Zhigao Hu,
Junhao Chu
Publication year - 2018
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/1.5025008
Subject(s) - steric effects , chemical physics , amorphous solid , deposition (geology) , monte carlo method , atomic layer deposition , morphology (biology) , diffusion , materials science , nanotechnology , work (physics) , nanoscopic scale , layer (electronics) , statistical physics , chemical engineering , chemistry , thermodynamics , crystallography , physics , organic chemistry , paleontology , statistics , mathematics , genetics , sediment , engineering , biology
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