Open AccessFabrication and characterization of uniaxially strained SOI with wafer level by mechanical bending and annealing
Author(s) -
Shujing Wu,
Dongming Miao,
Xianying Dai,
Chenfeng Shao,
Yue Hao
Publication year - 2018
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/1.5024444
Subject(s) - materials science , silicon on insulator , wafer , raman spectroscopy , fabrication , annealing (glass) , optoelectronics , crystallinity , tetragonal crystal system , silicon , composite material , optics , crystallography , crystal structure , medicine , chemistry , physics , alternative medicine , pathology
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