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Route to one-step microstructure mold fabrication for PDMS microfluidic chip
Author(s) -
Xiaoqing Lv,
Zhaoxin Geng,
Zhiyuan Fan,
Shicai Wang,
Yue Su,
Weihao Fang,
Weihua Pei,
Hongda Chen
Publication year - 2018
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/1.5023823
Subject(s) - microfluidics , fabrication , materials science , microelectromechanical systems , microfabrication , nanotechnology , mold , photolithography , microstructure , soft lithography , chip , etching (microfabrication) , microfluidic chip , biochip , composite material , computer science , medicine , telecommunications , alternative medicine , pathology , layer (electronics)

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