Open AccessRF power absorption by plasma of low pressure low power inductive discharge located in the external magnetic field
Author(s) -
E.A. Kralkina,
A. A. Rukhadze,
П. А. Неклюдова,
В.Б. Павлов,
A. K. Petrov,
К. В. Вавилин
Publication year - 2018
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/1.5023631
Subject(s) - helicon , plasma , antenna (radio) , magnetic field , rf power amplifier , atomic physics , current (fluid) , plasma channel , radio frequency , atmospheric pressure plasma , materials science , physics , optoelectronics , electrical engineering , amplifier , cmos , quantum mechanics , thermodynamics , engineering
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