Numerical implementation of a cold-ion, Boltzmann-electron model for nonplanar plasma-surface interactions | Zendy

J. T. Holgate | Zendy; M. Coppins | Zendy

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Numerical implementation of a cold-ion, Boltzmann-electron model for nonplanar plasma-surface interactions

Author(s) -

J. T. Holgate,

M. Coppins

Publication year - 2018

Publication title -

physics of plasmas

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.75

H-Index - 160

eISSN - 1089-7674

pISSN - 1070-664X

DOI - 10.1063/1.5021778

Subject(s) - physics , plasma , rotational symmetry , electron , surface (topology) , cartesian coordinate system , computational physics , boltzmann constant , mechanics , plasma etching , boltzmann equation , ion , etching (microfabrication) , classical mechanics , atomic physics , geometry , quantum mechanics , nanotechnology , layer (electronics) , mathematics , materials science

Plasma-surface interactions are ubiquitous in the field of plasma science and technology. Much of the physics of these interactions can be captured with a simple model comprising a cold ion fluid and electrons which satisfy the Boltzmann relation. However, this model permits analytical solutions in a very limited number of cases. This paper presents a versatile and robust numerical implementation of the model for arbitrary surface geometries in cartesian and axisymmetric cylindrical coordinates. Specific examples of surfaces with sinusoidal corrugations, trenches, and hemi-ellipsoidal protrusions verify this numerical implementation. The application of the code to problems involving plasma-liquid interactions, plasma etching, and electron emission from the surface is discussed.Plasma-surface interactions are ubiquitous in the field of plasma science and technology. Much of the physics of these interactions can be captured with a simple model comprising a cold ion fluid and electrons which satisfy the Boltzmann relation. However, this model permits analytical solutions in a very limited number of cases. This paper presents a versatile and robust numerical implementation of the model for arbitrary surface geometries in cartesian and axisymmetric cylindrical coordinates. Specific examples of surfaces with sinusoidal corrugations, trenches, and hemi-ellipsoidal protrusions verify this numerical implementation. The application of the code to problems involving plasma-liquid interactions, plasma etching, and electron emission from the surface is discussed.

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