Open AccessDesign of pressure-sensing diaphragm for MEMS capacitance diaphragm gauge considering size effect
Author(s) -
Gang Li,
Detian Li,
Yongjun Cheng,
Wenjun Sun,
Xiaodong Han,
Chengxiang Wang
Publication year - 2018
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/1.5021374
Subject(s) - capacitance , diaphragm (acoustics) , materials science , microelectromechanical systems , pressure sensor , deflection (physics) , linearity , acoustics , optics , electronic engineering , optoelectronics , mechanical engineering , physics , engineering , vibration , electrode , quantum mechanics
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