Open AccessEffect of electron-beam deposition process variables on the film characteristics of the CrOx films
Author(s) -
Po-Kai Chiu,
Yi-Ting Liao,
Hung-Yin Tsai,
Donyau Chiang
Publication year - 2018
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/1.5021372
Subject(s) - materials science , x ray photoelectron spectroscopy , analytical chemistry (journal) , molar absorptivity , amorphous solid , refractive index , substrate (aquarium) , microstructure , thin film , deposition (geology) , scanning electron microscope , chromium , optics , chemistry , nanotechnology , composite material , metallurgy , optoelectronics , chemical engineering , crystallography , paleontology , physics , oceanography , chromatography , sediment , engineering , biology , geology
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