Open AccessMoS2 solid-lubricating film fabricated by atomic layer deposition on Si substrate
Author(s) -
Yazhou Huang,
Lei Liu,
Jun Lv,
Junjie Yang,
Jingjie Sha,
Yunfei Chen
Publication year - 2018
Publication title -
aip advances
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/1.5021051
Subject(s) - lubricant , materials science , dry lubricant , layer (electronics) , substrate (aquarium) , atomic layer deposition , deposition (geology) , nanotribology , composite material , atomic force microscopy , friction coefficient , thin film , nanotechnology , tribology , paleontology , oceanography , sediment , biology , geology
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