Open AccessPhase control and Young’s modulus of tungsten thin film prepared by dual ion beam sputtering deposition
Author(s) -
Fei Zhu,
Zheng Xie,
Zhengjun Zhang
Publication year - 2018
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/1.5021009
Subject(s) - crystallinity , tungsten , materials science , sputter deposition , deposition (geology) , sputtering , phase (matter) , thin film , layer (electronics) , microstructure , composite material , substrate (aquarium) , ion beam assisted deposition , ion beam , analytical chemistry (journal) , ion , nanotechnology , metallurgy , chemistry , organic chemistry , paleontology , oceanography , sediment , geology , biology
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