Open AccessConformal coating of amorphous silicon and germanium by high pressure chemical vapor deposition for photovoltaic fabrics
Author(s) -
Xiaoyu Ji,
Hiu Yan Cheng,
Alex J. Grede,
Alex Molina,
Disha Talreja,
Suzanne E. Mohney,
Noel C. Giebink,
John V. Badding,
Venkatraman Gopalan
Publication year - 2018
Publication title -
apl materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.571
H-Index - 60
ISSN - 2166-532X
DOI - 10.1063/1.5020814
Subject(s) - materials science , chemical vapor deposition , silicon , amorphous silicon , coating , silane , conformal coating , microscale chemistry , amorphous solid , deposition (geology) , chemical engineering , composite material , nanotechnology , optoelectronics , crystalline silicon , organic chemistry , paleontology , chemistry , mathematics education , mathematics , sediment , engineering , biology
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